Diagnostic Techniques for Electrical Discharge Plasma Used in PVD Coating Processes

This article discusses the possibilities of two methods for monitoring Physical Vapor Deposition (PVD) process parameters: multi-grid probe, which makes it possible, in particular, to determine energy distribution ions one- or two-component plasma and spectrum analyzer glow discharge electromagnetic radiation signal based on Prony–Fourier multichannel inductive spectral analysis sensor. The curves argon low-voltage operation mode ion sources with closed electron current have been analyzed. With a decline current, average decreases, source efficiency (the ratio W voltage U) remains approximately at same level W/U ≈ 0.68, …, 0.71 operating range source. system can obtain not only spectra output sensor, but also deconvolution plasma. scheme is considered, be used both controlling processing process, including automated PVD installations.